Download A Guide to Hands-on MEMS Design and Prototyping by Kubby PDF

By Kubby

even if you're a pupil taking an introductory MEMS path or a working towards engineer who must wake up to hurry fast on MEMS layout, this functional advisor presents the hands-on adventure had to layout, fabricate and attempt MEMS units. you'll the right way to use foundry multi-project fabrication techniques for reasonably cheap MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. quite a few layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, in addition to workouts and layout demanding situations on the finish of each bankruptcy. ideas to the layout problem difficulties are supplied online.

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